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Dimer interaction with other defects

  Rapidly diffusing dimer pairs allows us to explain many of the apparently anomalous defect formation behaviour of other complexes in silicon. These have been discussed in the relevant chapters but are summarised briefly here:

1.
There are several different formation process for VO2, and one of these does not result in any loss of [Oi]; indeed, Oi is produced when $\rm VO \rightarrow VO_2$ by this unknown process. It seems likely this is the breakup of VO followed by trapping of V by a dimer (Chapter 5).
2.
The anomalous formation of thermal donors has been discussed briefly here, and in more depth in Chapter 9. It seems that thermal donors are formed through the aggregation of rapidly diffusing dimers.
3.
In the early stages of annealing C-rich Cz-Si there is strong Cs and CsOi signals; after anneals at 450$^\circ$C these are replaced with a weaker CsO2 signal and stronger CsO3 signal [239]. These can form through dimer aggregation to the earlier Cs and CsOi defects, and this is discussed further in Chapter 10.

The work performed on NNO defects involved anneals in temperature ranges at which the dimer is no longer stable.


next up previous contents
Next: Trimer formation Up: Oxygen-Oxygen defects Previous: Experimental Evidence
Chris Ewels
11/13/1997